Rockville, MD, April, 2019: AccuStrata has published a detailed technology report for current and prospective customers of the fiber optic-based AtOMS atomic absorption / optical emission system for monitoring PVD thin film deposition and ion etching. The AtOMS system offers simultaneous monitoring of deposition rate, film quality and composition during multi-element deposition. The fiber-based design allows for easy retrofitting of existing PVD and etch tools. Users can find the full report at HERE.
AccuStrata | Press Release