Key Differentiators

• The miniature fiber optics monitoring sensors are installed inside the vacuum deposition equipment (a feature covered by our patents). This avoids modification of the customer machine and saves money

• The sensors miniaturization allows installation of many sensors in all critical locations

• The sensors can be configured in both a parallel configuration (to measure uniformity and homogeneity) and in a series configuration to monitor different stages of deposition of the same or different thin film layers.

• Our solution allows monitoring from the back side of the glass substrate for a typical superstrate process or from the front side of the film for substrate processes.

• Our solution allows monitoring in very close proximity to the film surface and measuring optical scattering and surface roughness as the film is deposited.

• Our solution provides important information about the deposited film such as deposition rate, film thickness, material band-gap, surface roughness, porosity, uniformity over large areas of the panel and parameter homogeneity.