OMIR

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The OMIR is a spectroscopic monitoring tool able to monitor deposition processes in real time from within the chamber. Fiber optics allow the OMIR to be placed significant distances away from the deposition chamber with a small sensor placed inside the chamber.

The increased wavelength range of the OMIR allows it to monitor many processes that may not be able to be monitored by traditional spectroscopy.

[table caption=”” colwidth=”20|100″ colalign=”left|center”] Measurement,Details
Spectral Range,400-2100 nm
Optical Resolution,400-1000 nm ~1 nm FWHM | 1000-2100 nm ~4.5 nm FWHM
Source Type, High Powered Tungsten-Halogen
Nominal Bulb Power,20 W
Source Lifetime,1000 hr (typical)
Warm-up Time,~15 min
Power Requirements,100-120 V | 50-60 Hz
Connection Type, USB type B
Dimensions,16” x 12” x 5.5”

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