AccuStrata Publishes Detailed Technology Overview of AtOMS System

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  • April 30, 2019

Rockville, MD, April, 2019: AccuStrata has published a detailed technology report for current and prospective customers of the fiber optic-based AtOMS atomic absorption / optical emission system for monitoring PVD thin film deposition and ion etching. The AtOMS system offers simultaneous monitoring of deposition rate, film quality and composition during multi-element deposition. The fiber-based design allows for easy retrofitting of existing PVD and etch tools. Users can find the full report at HERE.

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